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I know that in the 80s, there was a shift from aluminum gate material to polycrystalline silicon. I wonder because the 6502 was released in 1975 and there were a lot of different implementations and versions of it in the 80s. Did ICs use aluminum gate material anyway?

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According to visual6502.org's page of die images, the chip was produced with "polysilicon" which is apparently an alternative name for polycrystalline silicon.

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